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Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays
1 This Guide is intended in general for metrology on low stiffness substrates like wafers or other geometrical shapes such as panels
SEMI E112-1104 (technical revision)
gas cabinets) which include a process panel
8 and SEMI E137
E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM) Revision:SEMI E91-0725 - Current + Redline Determination of water vapor barrier*This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is official and authoritative version. 1
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