F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 1 The purpose of this

Name: F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 1 The purpose of this
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Description

1 The purpose of this Specification is to define a standard equipment capability to report recipe step and process-related data to the factory system

and define various characters

• Test wafers (refer to SEMI M8)

SEMI E138-0709 (technical revision)

SEMI E68-0997 (Reapproved 1103)

F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 1 The purpose of thisglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org19996200411 : POU Referenced SEMI Standards None.

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