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C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Process Chemicals - Precursors but not exclusively

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Description

but not exclusively

previously published November 2002

It should be noted that the following list of criteria was considered when determining the specified analytical method: Reliability

SEMI D19-0299E (editorial revision)

and/or mechanical process

C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Process Chemicals - Precursors but not exclusivelyThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1990. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials. Referenced SEMI Standards None.

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