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dry silicon (Si) wafers supported on two belts that move the test specimen through the measurement equipment
3-0417 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)
The glass involved in this Standard is restricted to physically fully-tempered glasses or physically heat strengthened glasses
with coverage of more than 1
SEMI E15 — Specification for Tool Load port
F02300 - SEMI F23 - グレード10/0.2 引火性特殊ガスの粒子に関する仕様 Revision:SEMI F23-0697 (Reapproved 0712) - Superseded dry silicon (Si) wafers supportedglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 H2 Referenced SEMI Standards SEMI C6. 3 Particle Specification for Grade 20 0. 2 Hydrogen (H2) Delivered as Pipeline Gas