E06900 - SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers Revision:SEMI E69-0298 (Reapproved 0913) - Inactive Determination of water vapor barrier

Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays

This Guide will address the various metrology techniques that are currently available that enable TSV dimensional measurements

本スタンダードでは，各用語について定義し，それを解釈することで，

between a box or cassette and a tool load-port or vehicle nest

their specifications

E06900 - SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers Revision:SEMI E69-0298 (Reapproved 0913) - Inactive Determination of water vapor barrierNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Document is to provide a standardized method to quantify the reproducibility and zero drift of a thermal mass flow controller (MFC). The intent of this Document is not to suggest any specific testing