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SEMI E111-1106 (technical revision)
本方法は，PFA融着継手による接合部に加える引張り強度を測定する一定の手順を提供するものである。
1 This Guide provides a description of tools that can be used to determine these key parameters before
1-1017 (technical revision)
SEMI E138-0217 (title change)
F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current SEMI E111-1106 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published in 1995; previously published November 2002. NOTICE: This Document was completely rewritten in 2016. The purpose of this Standard is to classify microelectronics clean
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