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The ‘as received’ test is intended to enable the user to evaluate the fabrication
SEMI D63-0818 (technical revision)
All measurement techniques are performed using an inductive-coil (eddy-current) sensor energized at a radio frequency and an illumination source
SEMI MF673-1105 (Reapproved 0622)
SEMI T10-0701 (first published)
HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface StdPbc-0921 The ‘as received’ test isThe purpose of this Standard is to provide a supplement for the equipment automation interface for communication and control of process, automation and metrology equipment used in HB LED manufacturing. It intends to define the data collection for tracking wafer activity when using a susceptor or a wafer carrier. This Standard serves as a reference for both HB LED manufacturers and equipment suppliers. The document details properties and functions of