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E16600 - SEMI E166 - 450 mmクラスタモジュール・インタフェースのための仕様:機械的インタフェースおよび搬送のスタンダード StdPbc-0122 • Total Semiconductor Equipment Forecast

SKU: 14065120139

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Description

• Total Semiconductor Equipment Forecast

) versions of the SMIF port

To evaluate the contrast of display devices under ambient light is more practical than in a dark environment

1-0306 (first published)

flat panel display (FPD)画質検査におけるムラの目視検査に近いテスト条件に対する,SEMI D31で導出された方式の適用方法を定義する。

E16600 - SEMI E166 - 450 mmクラスタモジュール・インタフェースのための仕様:機械的インタフェースおよび搬送のスタンダード StdPbc-0122 • Total Semiconductor Equipment ForecastSEMI SEMI Physical Interfaces & Carriers Global Technical Committee2014617global Audits and Reviews Subcommittee20148www. semiviews. org www. semi. org20135 450 mm 450 mm Referenced SEMI Standards SEMI E21 Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard SEMI E21. 1 Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard SEMI E154 Mechanical Interface Specification for 450 mm Load Port

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