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it has been replaced by SEMI C71
SEMI C20-0213 (Reapproved 1218)
and analytical procedures for hydrogen (H2)
such layers may affect the performance of the metrology tools described below
NOTICE: This Document was reapproved with minor editorial changes
C06200 - SEMI C62 - Specification for Porogen Precursors Used in Low K CVD Processes StdTpc-Gases - Specialty it has been replaced byThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published November 2007; previously published March 2009. The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which
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