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originally published June 1999
Changes were made to ¶ 11
It focuses on the various measurement methods available
SEMI C36-0301 (technical revision)
SEMI M1 — Specification for Polished Single Crystal Silicon Wafers
C04100 - SEMI C41 - Specification and Guide for 2-Propanol Revision:SEMI C41-0705 - Superseded originally published June 1999This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published in 1978; previously published July 2005. NOTICE: Paragraphs entitled NOTE: are not an official part of this Standard or Safety Guideline and are not intended to modify