F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1215 SEMI E92-0200 (technical revision)

SEMI E92-0200 (technical revision)

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예외사항(exception) 및 트레이스 데이터(Trace Data)를 취득하는 수단을 제공한다

F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1215 SEMI E92-0200 (technical revision)This Document defines a test method for determining metallic elements present on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination