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vehicle and carrier state models)
NOTICE: This Standard was completely rewritten in 2024
The scope of this Standard is to provide concepts
SEMI E30-0998 (technical revision)
one that applies to all process chambers
D04100 - SEMI D41 - Measurement Method of SEMI MURA in FPD Image Quality Inspection Revision:SEMI D41-0305 - Inactive vehicle and carrier state models)This Standard was technically approved by the Flat Panel Display Factory Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 24, 2004. Available at www. semi. org in March 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and