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E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port Revision:SEMI E184-1221E - Superseded 125 mm (5 in

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Description

125 mm (5 in

such as epitaxial layers

2-0698 (Reapproved 0710) - Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots

Access to intelligence present in low-level devices

and extrusion) used to manufacture high purity components used in chemical distribution systems

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port Revision:SEMI E184-1221E - Superseded 125 mm (5 in1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this

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